Mass thickness determination and microanalysis of thin films in the TEM--revisited.

Abstract

Calibrating on a series of thicknesses of a single element we arrive at a simple method of mass thickness determination for amorphous and polycrystalline films in the transmission electron microscopy (TEM). The conditions to be fulfilled are: acceleration voltage 200 kV or higher and measuring the integrated transmitted electron intensity in a wide range of… (More)

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Cite this paper

@article{Pozsgai2007MassTD, title={Mass thickness determination and microanalysis of thin films in the TEM--revisited.}, author={I. Pozsgai}, journal={Ultramicroscopy}, year={2007}, volume={107 2-3}, pages={191-5} }