Mass-Producible Monolithic Silicon Probes for Scanning Probe Microscopes

@inproceedings{Liu1998MassProducibleMS,
  title={Mass-Producible Monolithic Silicon Probes for Scanning Probe Microscopes},
  author={Chang Liu and Ronald Gamble},
  year={1998}
}
SUMMARY In this paper, we describe the design, fabrication, and testing of monolithically micromachined silicon probes for scanning probe microscope (SPM) applications. An SPM probe consists of three parts: an atomically sharp tip, a supporting flexural beam, and a handle. Unique design and fabrication processes allow probes with uniform geometry be… CONTINUE READING