Mask Cost and Profitability in Photomask Manufacturing: An Empirical Analysis


An empirical study of the economics of manufacturing photomasks concludes that the uncontrolled growth of optical proximity effect correction and resolution enhancement techniques is driving up the cost of pattern generation and mask inspection to levels that threaten the profitability of photomask manufacturing. The intrinsic cost of some leading edge… (More)


8 Figures and Tables


Citations per Year

Citation Velocity: 6

Averaging 6 citations per year over the last 3 years.

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