Manufacturing of high performance VIS-NIR beam splitters by plasma assisted thin film deposition technologies

@inproceedings{Weber2018ManufacturingOH,
  title={Manufacturing of high performance VIS-NIR beam splitters by plasma assisted thin film deposition technologies},
  author={Thomas Weber and Marc Lappschies and Stefan Jakobs},
  booktitle={Optical Systems Design},
  year={2018}
}
Beam splitters separating visible (VIS) and near-infrared (NIR) light are an important component of many optical systems such as spectrometers or telescopes. Here, one part of the spectrum is transmitted while the other is reflected. Typical goal requirements are broadband high transmittance and high reflectance without local minima combined with a steep transition zone. These requirements drive the complexity of the coating design. Beside the coating design also the deposition technology has… CONTINUE READING

References

Publications referenced by this paper.
SHOWING 1-10 OF 13 REFERENCES

Low scattering filter coatings made by plasma-assisted reactive magnetron sputtering

Jan Broßmann, Marc Lappschies, Stefan Jakobs, Volker Kirschner
  • SPIE Optical Systems Design
  • 2015