• Materials Science
  • Published 2006

Manufacturing method of resist liquid and resist film using the same

@inproceedings{2006ManufacturingMO,
  title={Manufacturing method of resist liquid and resist film using the same},
  author={기미타카 모리오 and 도모사부로 아오키},
  year={2006}
}
A resist solution manufacturing method and a resist layer using the same are provided to decrease a transfer amount of resist solution by obtaining the resist solution with an aiming concentration from a high density source solution. A mixed solution is obtained by mixing and stirring a high concentration source solution with a predetermined solvent(S102). A concentration/viscosity measuring process is performed on the mixed solution(S103). The mixed solution is properly controlled to obtain an… CONTINUE READING