Manufacturing in the 21st century-new concept for 300 mm fab

  • Akiko Koike
  • Published 2001 in
    2001 Symposium on VLSI Technology. Digest of…

Abstract

Trecenti Technologies, Inc. is currently creating the first 300 mm-wafer volume production fab. Our basic objectives are to minimize cycle time with all single-wafer processes and to create a scalable fab that has an optimized expansion unit to satisfy high investment efficiency and flexibility to changing market needs. 

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Cite this paper

@article{Koike2001ManufacturingIT, title={Manufacturing in the 21st century-new concept for 300 mm fab}, author={Akiko Koike}, journal={2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.01 CH37184)}, year={2001}, pages={1-4} }