Manufacturing and full characterization of silicon carbide-based multi-sensor micro-probes for biomedical applications

@article{Gabriel2007ManufacturingAF,
  title={Manufacturing and full characterization of silicon carbide-based multi-sensor micro-probes for biomedical applications},
  author={Gemma Gabriel and Ivan Erill and Jaume Caro and Rodrigo G{\'o}mez and Dolors Riera and Rosa Villa and Philippe Godignon},
  journal={Microelectronics Journal},
  year={2007},
  volume={38},
  pages={406-415}
}
Semi-insulating silicon carbide (SiC) is a fully processable semiconductors substrate that is commonly used as an alternative to conventional silicon (Si) in high-power applications. Here we examine the feasibility of using SiC as a substrate for the development of minimally invasive multi-sensor micro-probes in the context of organ monitoring during… CONTINUE READING