Manipulation of amorphous Ge 2 Sb 2 Te 5 nano-structures in isolated and crystalline environment.

@inproceedings{Mio2011ManipulationOA,
  title={Manipulation of amorphous Ge 2 Sb 2 Te 5 nano-structures in isolated and crystalline environment.},
  author={Antonio M. Mio and G. D'arrigo and Egidio Carria and Corrado Bongiorno and Samuele Rossini and Corrado Spinella and Maria Grazia Grimaldi and Emanuele Rimini},
  year={2011}
}
We have investigated the stability of nano-amorphous region of Ge 2 Sb 2 Te 5 (GST), fabricated by Electron Beam Lithography (EBL), dry etching, and ion implantation. Nano-structures, less than 100 nm in diameter and 20 nm thick, were either embedded in a crystalline environment or just isolated. We have observed nano-structure crystallization by in situ Transmission Electron Microscopy (TEM) in the 75°C-150°C temperature range. Re-crystallization of amorphous dots embedded in a crystalline… CONTINUE READING