Mainstreaming of SOI Technology

  title={Mainstreaming of SOI Technology},
  author={G. G. Shahidi},
  journal={29th European Solid-State Device Research Conference},
  • G. G. Shahidi
  • Published 1999 in
    29th European Solid-State Device Research…
Partially-Depleted deep sub-micron CMOS on Sal technology is becoming a mainstream technology. This technology offers 20-35% performance gain over a bulk technology implemented with the same lithography. This paper first reviews the partially-depleted Sal device and describes reasons why it was chosen over fully depleted Sal device. Next the sources of… CONTINUE READING