Magnetron sputtering : a review of recent developments and applications

  title={Magnetron sputtering : a review of recent developments and applications},
  author={Patrick D. Kelly and R. D. Arnell},
Magnetron sputtering has become the process of choice for the deposition of a wide range of industrially important coatings. Examples include hard, wear-resistant coatings, low friction coatings, corrosion resistant coatings, decorative coatings and coatings with speci"c optical, or electrical properties. Although the basic sputtering process has been known and used for many years, it is the development of the unbalanced magnetron and its incorporation into multi-source &closed-"eld' systems… CONTINUE READING
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