Magnetron sputtering: a review of recent developments and applications

@inproceedings{Kelly2000MagnetronSA,
  title={Magnetron sputtering: a review of recent developments and applications},
  author={Patrick James Kelly and R. Derek Arnell},
  year={2000}
}
Abstract Magnetron sputtering has become the process of choice for the deposition of a wide range of industrially important coatings. Examples include hard, wear-resistant coatings, low friction coatings, corrosion resistant coatings, decorative coatings and coatings with specific optical, or electrical properties. Although the basic sputtering process has been known and used for many years, it is the development of the unbalanced magnetron and its incorporation into multi-source `closed-field… CONTINUE READING
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