Magnetic and microstructural properties of thick sputtered NdFeB films.


Thick NdFeB films have been prepared by triode sputtering with a deposition rate of 20 mum/hour. Films were deposited on either "cool" substrates or onto substrates heated in the range 300-500degC and then annealed at 750degC for 10 minutes. Magnetic characterisation was carried out at room temperature with an extraction magnetometer in fields of up to 10 T… (More)


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