Machine-Learning-Based Hotspot Detection Using Topological Classification and Critical Feature Extraction

@article{Yu2015MachineLearningBasedHD,
  title={Machine-Learning-Based Hotspot Detection Using Topological Classification and Critical Feature Extraction},
  author={Yen-Ting Yu and Geng-He Lin and Iris Hui-Ru Jiang and Charles C. Chiang},
  journal={IEEE Trans. on CAD of Integrated Circuits and Systems},
  year={2015},
  volume={34},
  pages={460-470}
}
Because of the widening sub-wavelength lithography gap in advanced fabrication technology, lithography hotspot detection has become an essential task in design for manufacturability. Unlike current state-of-the-art works, which unite pattern matching and machine-learning engines, we fully exploit the strengths of machine learning using novel techniques. By combing topological classification and critical feature extraction, our hotspot detection framework achieves very high accuracy. Furthermore… CONTINUE READING

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SHOWING 1-8 OF 8 CITATIONS

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  • 2017
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  • IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
  • 2018
VIEW 5 EXCERPTS
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Pattern Similarity Metrics for Layout Pattern Classification and Their Validity Analysis by Lithographic Responses

  • 2018 IEEE Computer Society Annual Symposium on VLSI (ISVLSI)
  • 2018
VIEW 5 EXCERPTS
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  • 2019
VIEW 2 EXCERPTS
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  • IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
  • 2018

Minimizing cluster number with clip shifting in hotspot pattern classification

  • 2017 54th ACM/EDAC/IEEE Design Automation Conference (DAC)
  • 2017
VIEW 2 EXCERPTS
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VLSI layout hotspot detection based on discriminative feature extraction

  • 2016 IEEE Asia Pacific Conference on Circuits and Systems (APCCAS)
  • 2016
VIEW 2 EXCERPTS
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