MOX gas sensors using multilayer aerogel

  title={MOX gas sensors using multilayer aerogel},
  author={Sanjay Kumar and Mohammad R. Madani and Mohammad Seyedjalali},
  journal={2013 IEEE SENSORS},
In this work for the first time we have demonstrated the feasibility of multilayer silica aerogel interleaved with thin layers of SiO2, to replace the micromachined air pit used in fabrication of metal oxide (MOX) gas sensors. Microhotplate is the most important structure of MOX gas sensors since it provides the desired uniform temperatures ranging from 200… CONTINUE READING