MICRO COIL FABRICATION FOR UBIQUITOUS POWER MONITORING

@inproceedings{Zhang2011MICROCF,
  title={MICRO COIL FABRICATION FOR UBIQUITOUS POWER MONITORING},
  author={Yonghan Zhang and Shiro Uchiyama and D. K. Lee and Hiroshi Hiroshima and Tomonori. Itoh and Ryutaro Maeda},
  year={2011}
}
This paper presents our recent progress on the microfabrication technology of micro coil for ubiquitous power monitoring. Electromagnetic simulations and experiments demonstrated that micro solenoid-type inductor is attractive for the current sensing and thus power-consumption monitoring application. A three-dimensional photolithography technology and equipment are successfully developed for the low-cost fabrication of micro solenoid coil structure. A so-called cylinder projection lithography… CONTINUE READING

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MEMS-based exposure module for continuous lithography process on fiber substrates

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