MEMS vibration electret energy harvester with combined electrodes

@article{Fu2014MEMSVE,
  title={MEMS vibration electret energy harvester with combined electrodes},
  author={Qianyan Fu and Yuji Suzuki},
  journal={2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2014},
  pages={409-412}
}
A novel in-plane MEMS electret energy harvester with combined electrodes of overlapping-area-change and gap-closing converters is proposed for large output power both at low and high vibration accelerations. An early prototype has been successfully micro-fabricated with the single layer silicon-on-insulator process. Soft X-ray charging is employed to establish uniform surface potential around 60 V on vertical electrets on the sidewall of the comb fingers. Up to 1.6 μW output power has been… CONTINUE READING