MEMS resonators actuated by TbCo/FeCo nanostructed magnetostrictive multilayers in liquid environment

  title={MEMS resonators actuated by TbCo/FeCo nanostructed magnetostrictive multilayers in liquid environment},
  author={Olivier Ducloux and J. W. Park and N. Tiercelin and P. Pernod and Vladimir Preobrazhensky and Morgan Hamon and Yasuyuki Sakai and Hiroyuki Fujita},
  journal={TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference},
  • O. Ducloux, J. Park, +5 authors H. Fujita
  • Published 2009
  • Materials Science
  • TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
This paper presents a novel type of remotely actuated, chemical or bio-sensor based on a MEMS resonator actuated by a multilayered (TbCo/FeCo) x25 nanostructured magnetostrictive film in liquid environment. The active film is polarized in order to induce Spin Reorientation Transition, yielding giant sensitivity to a dynamical actuation magnetic field. Moreover, the resonator is placed at the air/liquid interface in order to increase its quality factor. Sensing results in different viscosity… Expand

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  • 2000