MEMS fabrication process management environment

  title={MEMS fabrication process management environment},
  author={Jens Popp and Thilo Schmidt and Andreas Wagener and Kai Hahn},
  booktitle={SPIE MOEMS-MEMS},
New microfabrication technologies in the MEMS domain require novel approaches in computer aided design. Process issues in these technologies affecting the design are becoming increasingly important and Process information held in static design rule sets will be no longer sufficient. This paper describes the methodology and the implementation of a process management system that supports the designer in configuring application specific process flows with predictable properties. 

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