MEMS and MOEMS resonant frequencies analysis by Digital Holography Microscopy (DHM)

@inproceedings{Emery2013MEMSAM,
  title={MEMS and MOEMS resonant frequencies analysis by Digital Holography Microscopy (DHM)},
  author={Y. Emery and E. Solanas and Nicolas Aspert and A. Michalska and J. Parent and E. Cuche},
  booktitle={Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components},
  year={2013}
}
  • Y. Emery, E. Solanas, +3 authors E. Cuche
  • Published in
    Photonics West - Micro and…
    2013
  • Engineering, Materials Science
  • Digital Holographic Microscopes (DHMs) have unique features especially relevant for static and dynamical MEMS characterization. They provide both 3D topography with interferometric resolution and intensity image in a single acquisition at camera rate, without any lateral or vertical scanning. In this presentation, DHM is operated in conjunction with a laser pulsed stroboscopic module providing synchronization of camera, laser pulses, and MEMS excitation signal up to 25 MHz. Three methods for… CONTINUE READING