MEMS Technology for Optical Crosslink for Micro / Nano Satellites

@inproceedings{Piyawattanametha1998MEMSTF,
  title={MEMS Technology for Optical Crosslink for Micro / Nano Satellites},
  author={Wibool Piyawattanametha and Lawrence Fan and Seung S. Lee and John G. D. Su and Ming C. Wu},
  year={1998}
}
We report on a novel, compact twodimensional (2D) scanning micromirror for free space optical crosslinks for micro and nano satellites. Using a novel micromachined structure called MicroElevator by Self-Assembly (MESA) [1], the micromirror is suspended above the substrate by several hundred micrometers. Large mirror size and wide scanning range are achieved… CONTINUE READING