MEMS Reliability Review

  title={MEMS Reliability Review},
  author={Yunhan Huang and Arvind Sai Sarathi Vasan and Ravi Doraiswami and Michael Osterman and M. G. Pecht},
  journal={IEEE Transactions on Device and Materials Reliability},
Microelectromechanical systems (MEMS) represents a technology that integrates miniaturized mechanical and electromechanical components (i.e., sensors and actuators) that are made using microfabrication techniques. MEMS devices have become an essential component in a wide range of applications, ranging from medical and military to consumer electronics. As MEMS technology is implemented in a growing range of areas, the reliability of MEMS devices is a concern. Understanding the failure mechanisms… CONTINUE READING
Highly Cited
This paper has 42 citations. REVIEW CITATIONS

10 Figures & Tables



Citations per Year

Citation Velocity: 9

Averaging 9 citations per year over the last 3 years.

Learn more about how we calculate this metric in our FAQ.