MEMS Reliability Review

@article{Huang2012MEMSRR,
  title={MEMS Reliability Review},
  author={Yunhan Huang and Arvind Sai Sarathi Vasan and Ravi Doraiswami and Michael Osterman and M. G. Pecht},
  journal={IEEE Transactions on Device and Materials Reliability},
  year={2012},
  volume={12},
  pages={482-493}
}
Microelectromechanical systems (MEMS) represents a technology that integrates miniaturized mechanical and electromechanical components (i.e., sensors and actuators) that are made using microfabrication techniques. MEMS devices have become an essential component in a wide range of applications, ranging from medical and military to consumer electronics. As MEMS technology is implemented in a growing range of areas, the reliability of MEMS devices is a concern. Understanding the failure mechanisms… CONTINUE READING
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