M ay 2 00 8 Consideration of arrayed e - beam microcolumn based systems potentialities for wafer defects inspection

  • T. N. Savitskaja
  • Published 2008

Abstract

The e-beam column which is intended on defects inspection is considered. The defects which are to be examined or potentially might be examined at inspection stage are briefly considered. Interrelations between the system parameters is ascertaining and the ways of optimization and the technical requirements to the system in whole are discussed. As a result… (More)

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Cite this paper

@inproceedings{Savitskaja2008MA2, title={M ay 2 00 8 Consideration of arrayed e - beam microcolumn based systems potentialities for wafer defects inspection}, author={T. N. Savitskaja}, year={2008} }