M Odel for the Voltage and Charge Actuations of Deformable Clamped-clamped Beams in Presence of Dielectric Charging

Abstract

 Using the SEM analysis technique, we present the first direct evidences of the non-uniform distribution of charges trapped in the dielectric layer during the actuation of electrostatic MEM devices. We highlight the importance of the contact quality to control the charge injection in the dielectric. We further incorporate the non-uniform charge… (More)

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