Low temperature low ppm acetone detection by Pd/TiO<inf>2</inf>/p-Si Metal-Insulator-Semiconductor devices

Abstract

In this present investigation nanocrystalline TiO<sub>2</sub> based sensor was developed for low ppm level (10-100) acetone detection. TiO<sub>2</sub> thin film (Thickness: 1 &#x03BC;m) was prepared by solgel technique and deposited on the p-Si substrate (5 &#x03A9;cm, (100)) by dip coating method. Film was annealed at 450&#x00B0;C for 3 hours in air… (More)

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Cite this paper

@article{Hazra2013LowTL, title={Low temperature low ppm acetone detection by Pd/TiO2/p-Si Metal-Insulator-Semiconductor devices}, author={A. Hazra and B. Bhowmik and K. Dutta and Pritish Bhattacharyya}, journal={2013 Seventh International Conference on Sensing Technology (ICST)}, year={2013}, pages={396-400} }