Low pressure pulse-modulated and radio-frequency plasma for CF/sub 4/ decomposition

Abstract

The CF/sub 4/ is one of the most stable gases among perfluorocarbons (PFCs) and their decomposition is extremely difficult. In this study, the CF/sub 4/ decomposition was investigated using the pulse-modulated and radio-frequency (RF) plasma of 2 MHz, which is applicable for plasma etching and novel functional material manufacturing processes. When the… (More)

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Cite this paper

@article{Kuroki2005LowPP, title={Low pressure pulse-modulated and radio-frequency plasma for CF/sub 4/ decomposition}, author={Tomoyuki Kuroki and Satoshi Tanaka and Masaaki Okubo and T. Yamamoto}, journal={Fourtieth IAS Annual Meeting. Conference Record of the 2005 Industry Applications Conference, 2005.}, year={2005}, volume={4}, pages={2900-2905 Vol. 4} }