Low noise, low power micromechanical oscillator

@article{Rantakari2005LowNL,
  title={Low noise, low power micromechanical oscillator},
  author={Pekka Rantakari and Ville Kaajakari and Timo Mattila and Jyrki Kiihamaki and A. Oja and Ilkka Tittonen and H. Seppa},
  journal={The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.},
  year={2005},
  volume={2},
  pages={2135-2138 Vol. 2}
}
A 180-nm gap micromechanical resonator biased at 20 V and full custom integrated electronics are used to implement a 13-MHz oscillator that has noise floor of -147 dBc/Hz and power consumption of 240 /spl mu/W including both the loop amplifier and the buffer to a 10-pF load. The design of Pierce type MEMS oscillator is discussed in terms of noise, power, and oscillator stability. 

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