Low-loss one-dimensional photonic bandgap filter in (110) silicon.

@article{Lipson2006LowlossOP,
  title={Low-loss one-dimensional photonic bandgap filter in (110) silicon.},
  author={Ariel Lipson and Eric M. Yeatman},
  journal={Optics letters},
  year={2006},
  volume={31 3},
  pages={395-7}
}
A free-space silicon one-dimensional photonic bandgap optical filter is designed and fabricated. A two-stage (110) wafer etching process is employed to form the extremely vertical, smooth, and high-aspect-ratio features that are essential for good optical properties. The (111) oriented planes of the wafer form <0.01 degrees off-vertical trenches that make… CONTINUE READING