Low-loss high-confinement waveguides and microring resonators in AlGaAs-on-insulator.

  title={Low-loss high-confinement waveguides and microring resonators in AlGaAs-on-insulator.},
  author={Luisa Ottaviano and Minhao Pu and Elizaveta Semenova and Kresten Yvind},
  journal={Optics letters},
  volume={41 17},
AlGaAs is a promising material for integrated nonlinear photonics due to its intrinsic high nonlinearity. However, the challenging fabrication of deep etched AlGaAs devices makes it difficult to realize high-performance devices such as low-loss dispersion engineered waveguides and high-quality microring resonators. Here, we report a process to make high-quality AlGaAs-on-insulator (AlGaAsOI) wafers where high confinement waveguides can be realized. Using optimized patterning processes, we… CONTINUE READING
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