Low-loss Si3N4 arrayed-waveguide grating (de)multiplexer using nano-core optical waveguides.

@article{Dai2011LowlossSA,
  title={Low-loss Si3N4 arrayed-waveguide grating (de)multiplexer using nano-core optical waveguides.},
  author={Daoxin Dai and Zhi Wang and Jared F. Bauters and M. V. Tien and Martijn J. R. Heck and Daniel J. Blumenthal and John E. Bowers},
  journal={Optics express},
  year={2011},
  volume={19 15},
  pages={14130-6}
}
A 16-channel 200 GHz arrayed-waveguide grating (AWG) (de)-multiplexer is demonstrated experimentally by utilizing Si3N4 buried optical waveguides, which have 50 nm-thick Si3N4 cores and a 15 μm-thick SiO2 cladding. The structure with an ultra-thin core layer helps to reduce the scattering due to the sidewall roughness and consequently shows very low loss of about 0.4~0.8 dB/m. When using this type of optical waveguide for an AWG (de)multiplexer, there is no problem associated with gap refill… CONTINUE READING
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