Low dielectric constant materials.

@article{Volksen2010LowDC,
  title={Low dielectric constant materials.},
  author={Willi Volksen and Robert Douglas Miller and Geraud Jean-michel Dubois},
  journal={Chemical reviews},
  year={2010},
  volume={110 1},
  pages={
          56-110
        }
}
Modern computer microprocessor chips are marvels of engineering complexity. For the current 45 nm technology node, there may be nearly a billion transistors on a chip barely 1 cm2 and more than 10 000 m of wiring connecting and powering these devices distributed over 9-10 wiring levels. This represents quite an advance from the first INTEL 4004B microprocessor chip introduced in 1971 with 10 μm minimum dimensions and 2 300 transistors on the chip! It has been disclosed that advanced… CONTINUE READING
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