Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology

@article{Xu2016LowcostTT,
  title={Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology},
  author={Wei Xu and Bo Gao and Shenhui Ma and Anping Zhang and Yi Chiu and Yi-Kuen Lee},
  journal={2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2016},
  pages={189-192}
}
In this paper, a low-cost Temperature-compensated Thermoresistive Micro Calorimetric Flow (T2MCF) sensor by using a commercial 0.35μm 2P4M CMOS MEMS technology is reported. For nitrogen flow, the fabricated T2MCF sensor achieves a normalized sensitivity of 230 mV/(m/s)/mW with respect to the input heating power, which is two orders of magnitude better than the reported micro calorimetric flow sensors. The experimental results of T2MCF sensor under different ambient temperatures Ta of 22°C~48°C… CONTINUE READING

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