Low cost RF MEMS switches using LCP substrate

Abstract

In this paper, we present an RF MEMS switch developed on a low cost, flexible liquid crystal polymer (LCP) substrate. LCP's very low water absorption (0.04%), low dielectric loss and multi-layer circuit capability make it very appealing for RF systems-on-a-package (SOP). Here we present for the first time capacitive MEMS switch fabrication on an LCP… (More)

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