Low and increased solubility of silicon in metal nitrides : evidence by X-ray absorption near edge structure

@inproceedings{Endrino2007LowAI,
  title={Low and increased solubility of silicon in metal nitrides : evidence by X-ray absorption near edge structure},
  author={Jose Luis Endrino and Sergio Palacı́n and Alejandro Gutierrez and Franz Sch{\"a}ffers and James E. Krzanowski},
  year={2007}
}
Adding silicon to transition metal nitride (MN) films has been reported to significantly improve many of their mechanical properties including hardness, toughness, and oxidation resistance [1, 2]. As a result, the influence of microstructure on the mechanical properties of siliconcontaining metal nitrides has been a subject of intensive investigation for… CONTINUE READING