Low-Loss Thin Film Microstrip Lines and Filters Based on Magnetorheological Finishing

This paper presents a surface finishing method based on magnetorheological fluid to obtain low-loss high-frequency transmission lines and filters on CMOS-grade silicon. As specimens for the magnetorheological finishing, high- and low- thin film microstrip lines with a 20 m-thick polyimide interface above the ground plane that is patterned on the silicon… (More)