Low-Loss Distributed MEMS Phase Shifter


This letter presents a one-bit low-loss -band phase shifter circuit that employs microelectromechanical systems (MEMS) capacitors. The measured results demonstrate a delay line with a 180 phase shift/1.17 dB loss phase shift at 25 GHz, 270 phase shift/1.69 dB loss at 35 GHz, and a return loss better than 11 dB over a 0–35-GHz band. The state-of-the-art… (More)


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