Low Dielectric Constant Spin-on-Polymers for Interlayer Dielectric Applications

@article{Sun1996LowDC,
  title={Low Dielectric Constant Spin-on-Polymers for Interlayer Dielectric Applications},
  author={S. C. Sun and Y. C. Chuang},
  journal={ESSDERC '96: Proceedings of the 26th European Solid State Device Research Conference},
  year={1996},
  pages={101-104}
}
This paper will present the characterization results of two low dielectric constant methylsilsesquioxane spin-on polymers and a conventional siloxane SOG. The chemical bonding structure, thermal stability, stress-temperature variations and the leakage current will be examined.