Low - k Polyimide/Silica Nanocomposites for Microelectronics Applications

Abstract

The temperature and frequency dependence of dielectric permittivity of hybrid polyimide/silica nanocomposites, prepared by the in situ generation of crosslinked organosilicon nanophase by sol-gel techniques, was investigated by broadband dielectric relaxation spectroscopy. Dielectric permittivity decreases and its frequency and temperature dependence… (More)

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@article{Logakis2006LowK, title={Low - k Polyimide/Silica Nanocomposites for Microelectronics Applications}, author={Emmanuel Logakis and Daniel Fragiadakis and Polycarpos Pissis}, journal={2006 25th International Conference on Microelectronics}, year={2006}, pages={113-116} }