Loss optimization of coplanar strips for CMOS RFICs

  title={Loss optimization of coplanar strips for CMOS RFICs},
  author={Muhammad Shoaib Arif and Dimitrios Peroulis},
  journal={2009 Asia Pacific Microwave Conference},
An optimization scheme for minimizing substrate losses in coplanar strips (CPS) transmission line on CMOS grade low resistivity silicon substrate with SU-8 polymer as dielectric interface layer, is presented. It is shown that through careful selection of CPS linewidth, the substrate losses can be sufficiently reduced for a given dielectric layer thickness. For a 100 Ω CPS line with SU-8 polymer as dielectric, the optimized linewidth has been found to be around three times the SU-8 layer… CONTINUE READING
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