Lorentz force effects on the electron energy distribution in inductively coupled plasmas.

Abstract

Depletion of the electron energy distribution function by slow electrons in the skin layer has been observed in experiment in a cylindrical inductive discharge with a flat coil at low frequency and low gas pressure. The origin of the effect lies in the dependence of the ponderomotive force (caused by the rf magnetic field) on the electron thermal motion… (More)

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