Lorentz force MEMS magnetometer with frequency modulated output


This work presents a frequency output micromachined silicon magnetometer comprised of a low stiffness thermal-piezoresistive electromechanical resonator coupled to a Lorentz force generator. The Lorentz force generator utilizes a leverage mechanism amplifying the force by ~55X. Upon application of a magnetic field perpendicular to the device, the leveraged… (More)


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