Location-dependent frequency tuning of vibrating micromechanical resonators via laser trimming

@article{Abdelmoneum2004LocationdependentFT,
  title={Location-dependent frequency tuning of vibrating micromechanical resonators via laser trimming},
  author={M. A. Abdelmoneum and M. M. Demirci and Yu-Wei Lin and C. T.-C Nguyen},
  journal={Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.},
  year={2004},
  pages={272-279}
}
Location-dependent, bidirectional laser trimming of the resonance frequencies of vibrating micromechanical resonators is demonstrated in steps as small as 21 ppm over it range of 20,200 ppm, and with targeting measures that suppress unwanted variations in Q and series motional resistance. Specifically, geometrically symmetrical laser targeting is shown to be instrumental in preserving high Q on the micro-scale, much more so than on the macro-scale. A semi-empirical model is used to model the… CONTINUE READING

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