Localized and CMOS compatible growth of carbon nanotubes on a 3 /spl times/ 3 /spl mu/m/sup 2/ microheater spot

Abstract

We present the synthesis of carbon nanotubes utilizing a localized chemical vapor deposition method. The modified method relies on the usage of local heat sources defined in microscale resistive heaters through a standard polysilicon based surface micromachining process instead of a global reaction furnace heating. The presented method provides a remedy to… (More)

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