• Materials Science
  • Published 2012

Loading and unloading device for batch processing of silicon chips, equipment and method thereof

@inproceedings{2012LoadingAU,
  title={Loading and unloading device for batch processing of silicon chips, equipment and method thereof},
  author={高鹏},
  year={2012}
}
The invention discloses a loading and unloading device for the batch processing of silicon chips, equipment and a method thereof. The method comprises a step of generating alarm information of a feeding platform to which the current batch of silicon chips belong when the fact that an atmospheric mechanical arm generates error report information of 'chip reading failure' or 'box entering timeout' is detected in real time, a step of controlling the atmospheric mechanical arm to stop the operation… CONTINUE READING