Lisbon , Portugal DETECTION OF SUBWAVELENGTH STRUCTURE PROFILE BY DECOMPOSITION OF MUELLAR MATRIX

Abstract

− Recently, the surface profiles of subwavelength structure have been reduced in size in order to develop microfabrication techniques. In particular, feature sizes of a few tens of nanometres are common in the semiconductor industry. This study uses a Mueller matrix polarimeter, which is based on a scatterometry technique, to evaluate the surface profiles… (More)

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