Liquid phase epitaxial growth of LiNbO3 thin film using Li2O-B2O3 flux system

  title={Liquid phase epitaxial growth of LiNbO3 thin film using Li2O-B2O3 flux system},
  author={Atsuo Yamada and Hitoshi Tamada and Masaki Saitoh},
  journal={Journal of Crystal Growth},
Abstract LiNbO 3 thin film optical waveguides were fabricated by liquid phase epitaxy. In order to improve the crystallinity and optical transparency of the film, a 5 mol% MgO-doped LiNbO 3 substrate and Li 2 O-B 2 O 3 flux system were used instead of a conventional combination of LiTaO 3 substrate and Li 2 O-V 2 O 5 flux system. Dependence of film properties on the melt composition was investigated in detail. As a result, high crystallinity with a small linewidth of 11.4 arc sec in the X-ray… Expand
Preparation of epitaxial LiNbO/sub 3/ films by the sol-gel method
  • K. Terabe, N. Iyi, +4 authors S. Kimura
  • Materials Science
  • Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics
  • 1994
The effect of substrates on the crystallinity and interdiffusion behaviors in sol-gel derived LiNbO/sub 3/ films were investigated using X-ray diffraction, transmission electron microscopy andExpand
Rib waveguides based on Zn-substituted LiNbO3 films grown by liquid phase epitaxy
Abstract The fabrication of epitaxially grown Zn-substituted LiNbO 3 (Zn:LiNbO 3 ) waveguide films and rib waveguides is reported and detailed investigations about microstructure, morphology andExpand
Crystal structure of LPE-grown LiNbO3 epitaxial films
Abstract LPE (liquid-phase epitaxial)-grown LiNbO 3 films with various thicknesses on LiNbO 3 substrates were characterized using diffraction-space maps and absolute lattice constants. The Li contentExpand
Incorporation of vanadium in liquid phase epitaxy films of LiNbO3
Second harmonic generation in Lithium Niobate (LN) thin films has been widely studied. This interest is extended to waveguides obtained by the Liquid Phase Epitaxy (LPE) technique due to the highExpand
Surface and structure characteristics of ZnO co-doped LiNbO3:Er thin films grown by liquid phase epitaxy method
Abstract Single crystal thin films of LiNbO 3 :Er co-doped with ZnO have been grown on (0 0 1) LiNbO 3 substrate by liquid phase epitaxy method. The Er 2 O 3 concentration in the melt of ZnO co-dopedExpand
Photorefractive damage in LiNbO3 thin film optical waveguides grown by liquid phase epitaxy (LPE) was evaluated by the in‐plane scattering method at the irradiation wavelength of 514 nm. We wereExpand
Liquid phase epitaxial growth and characterization of LiNbO3 single crystal films
Abstract LiNbO3 (LN) thin film crystals are prepared on LN substrates by a liquid phase epitaxial method. An X-ray double crystal diffraction technique is used to characterize misfit strain in LNExpand
Structural refinement of liquid-phase epitaxial-grown LiNbO3 films by simulation of X-ray rocking curve
Abstract An X-ray diffraction (XRD) simulation software based on the supercell model has been developed, which can calculate X-ray rocking curves of layered film/substrate systems by considering theExpand
LiNb1−xTaxO3 films prepared by thermal plasma spray CVD
LiNb1−xTaxO3 films with x=0.3–0.7, epitaxial orientation and good crystallinity were prepared by using thermal plasma spray CVD. Mixtures of metalorganic solutions containing lithiumniobium andExpand
Comparison of LiNbO3 flux systems for deposition on RIE-etched LiTaO3 substrates
Single-crystal LiNbO3 films were deposited by liquid phase epitaxy (LPE) onto inductively coupled plasma-assisted reactive ion etched (RIE) LiTaO3 substrates. The RIE-etched channels were 6 mu m wideExpand


LiNbO3 thin‐film optical waveguide grown by liquid phase epitaxy and its application to second‐harmonic generation
LiNbO3 thin‐film optical waveguides with high crystallinity and good surface morphology have been grown on 5 mol % MgO‐doped Z‐plate LiNbO3 substrates by liquid‐phase epitaxy using Li2O‐V2O5 flux. AExpand
The growth of LiNbO3 thin films by liquid phase epitaxial techniques
Abstract We report a liquid phase epitaxial dipping process for the growth of thin films of ferroelectric LiNbO 3 on isostructural LiTaO 3 substrates. These single crystalline films ranging from 1 toExpand
The growth of thin films of lithium niobate by chemical vapour de position
Abstract The growth of single crystal films of LiNbO3 on LiTaO3 substrates of (1010) orientation by chemical vapour deposition is described. The complex of Li with 2, 2, 6, 6 tetramethylheptane 3, 5Expand
Waveguiding epitaxial LiNbO3 layers deposited by radio frequency sputtering
Thin films of LiNbO3 were rf sputter deposited onto a number of different substrates and were investigated with a variety of characterization methods. The morphology of the films was investigated byExpand
Liquid‐phase‐epitaxial growth of single‐crystal LiNbO3 thin film
The phase equilibrium of the LiVO3‐LiNbO3 pseudobinary system has been investigated, and a LiNbO3 single‐crystal thin film has been grown epitaxially onto the substrate by dipping a c‐plate LiTaO3Expand
Liquid phase epitaxial growth of LiNbO3 thin films
Abstract LiNbO 3 layers have been grown on LiTaO 3 substrates by liquid phase epitaxy from a Li 2 O—V 2 O 5 flux. Phase diagram, supersaturation domain, and growth conditions have been investigated.Expand
Defects of lithium niobate crystals heavily doped with MgO
Abstract Water-clear LiNbO 3 single crystals containing MgO close to the solubility limit, ∽ 25 mol%, have been successfully grown. Someof the defects which are frequently encountered in the growthExpand
Epitaxial growth of ferroelectric films for optoelectronic (SAW) applications
Abstract The crystal chemical approach has been shown to be succesful in improving the temperature stability of the ferroelectric LiNbO 3 and LiTaO 3 phases. Results of this investigation show thatExpand
Liquid phase epitaxy of LiNbO3 thin films for integrated optics
LiNbO3 thin films have been obtained by liquid phase epitaxy from a Li2OV2O5 flux. Phase diagram, supersaturation domain, and growth conditions have been investigated. The propagation of light hasExpand
Proton exchange for high‐index waveguides in LiNbO3
We describe the fabrication and characterization of optical waveguides formed in LiNbO3 by proton exchange in benzoic acid melts at 200–250 °C. Proton exchange, in LiNbO3 the replacement of lithiumExpand