Linkage Design Effect on the Reliability of Surface Micromachined Microengines Driving a Load

Abstract

The reliability of microengines is a function of the design of the mechanical linkage used to connect the electrostatic actuator to the drive. We have completed a series of reliability stress tests on surface micromachined microengines driving an inertial load. In these experiments, we used microengines that had pin mechanisms with guides connecting the… (More)

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