Linearization of Electrostatically Actuated Surface Micromachined 2-D Optical Scanner

@inproceedings{Toshiyoshi2001LinearizationOE,
  title={Linearization of Electrostatically Actuated Surface Micromachined 2-D Optical Scanner},
  author={Hiroshi Toshiyoshi and Wibool Piyawattanametha and Cheng-Ta Chan and Ming C. Wu},
  year={2001}
}
This paper presents an effective method of linearizing the electrostatic transfer characteristics of micromachined two–dimensional (2-D) scanners. The orthogonal scan angles of surface micromachined polysilicon scanner are controlled by using quadrant electrodes for electrostatic actuation. By using a pair of differential voltages over a bias voltage, we could improve the distortion of projected images from 72% to only 13%. A theoretical model has been developed to predict the angle-voltage… CONTINUE READING
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