Limits of lithography

  title={Limits of lithography},
  author={Lloyd R. Harriott},
  journal={Proc. IEEE},
Lithography technology has been one of the key enablers and drivers for the semiconductor industry for the past several decades. Improvements in lithography are responsible for roughly half of the improvement in cost per function in integrated circuit (IC) technology. The underlying reason for the driving force in semiconductor technology has been the ability to keep the cost for printing a silicon wafer roughly constant while dramatically increasing the number of transistors that can be… 

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