Lift-off patterning of thin Au films on Si surfaces with atomic force microscopy

@article{Moon2000LiftoffPO,
  title={Lift-off patterning of thin Au films on Si surfaces with atomic force microscopy},
  author={Moon and Yoshinobu and Iwasaki},
  journal={Ultramicroscopy},
  year={2000},
  volume={82 1-4},
  pages={
          119-23
        }
}
We studied a new lift-off process of thin Au film on silicon surfaces in nanometer-scale, combining anodic oxidation patterning with AFM, deposition of Au thin film on the patterned substrate and chemical etching processes of the Si oxide underneath the Au film. For Au films of thickness of 2-5 nm, the Au films on the Si oxide patterns were left unbroken and bent down to stick to Si surface after the removal of the oxide by the chemical etching. For an Au film of 1 nm in thickness, it was… CONTINUE READING

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