Lead Zirconate Titanate Films Produced by ‘Facing Targets’ RF-Sputtering

@inproceedings{Roy1990LeadZT,
  title={Lead Zirconate Titanate Films Produced by ‘Facing Targets’ RF-Sputtering},
  author={Ronnen Andrew Roy and K. F. Etzold and Jerome J. Cuomo},
  year={1990}
}
The growth of ferroelectric lead zirconate titanate (PZT) films by rf-sputtering using facing targets is described. This study has focused on producing thin ( 

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RF-magnetron sputtering of piezoelectric lead-zirconate-titanate actuator films using composite targets

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