Lead Zirconate Titanate Films Produced by ‘Facing Targets’ RF-Sputtering

  title={Lead Zirconate Titanate Films Produced by ‘Facing Targets’ RF-Sputtering},
  author={Ronnen Andrew Roy and K. F. Etzold and Jerome J. Cuomo},
The growth of ferroelectric lead zirconate titanate (PZT) films by rf-sputtering using facing targets is described. This study has focused on producing thin ( 


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